8100 Series "TERPS" Pressure Sensor Platform - DESCRIPTION

The 8100 Series is a TERPS (Trench Etched Resonant Pressure Sensor) which allows for lower pressure ranges suited to barometric pressure measurements. The silicon-exposed diaphragm limits the use of the 8100 Series TERPS sensor to applications with dry, non-corrosive gases only. The 8100 Series TERPS sensor provides a superior level of performance, offering the highest accuracy and stability that surpasses all other current technologies.