8100 Series "TERPS" Pressure Sensing Platform - DESCRIPTION 
by Druck

The 8100 Series is a TERPS (Trench Etched Resonant Pressure Sensor) which allows for lower pressure ranges suited to barometric pressure measurements.  The silicon exposed diaphragm limits the use of the 8100 Series TERPS sensor to applications with dry, non-corrosive gases only.  The advantages of using the 8100 Series TERPS sensor is that it provides you with an order of magnitude greater performance over current technologies to provide the highest accuracy and stability sensor available.